School of Materials Science and Engineering, Nankai University, Tianjin 300350, P. R. China National Institute for Advanced Materials, Nankai University, Tianjin 300350, P. R. China ...
Abstract: It is anticipated that mm-wave multi-antenna transceivers will be architectures of choice for multi-Gbps wireless communication systems. Millimeter-wave ...
Abstract: Fully subtractive TopVia Ru interconnects with embedded airgap have been demonstrated through spacer assisted litho-etch litho-etch (SALELE) patterning, which utilizes a novel spacer pull ...